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Yuqing Yu

M.S. 2005: "Combinatorial doping of ferroelectrics"

The general goal of my projeYuqing Yuct is to create ferroelectric crystal films using a synthetic technique in which materials are sputtered onto Si substrate simultaneously from three targets, of which the normal is oriented 90° to that of the substrate, in a very oxygen-rich ambient (20-50% O2 in Ar by volume). With three sources, a ternary phase diagram may be obtained in a single experiment. The electrical properties of the ferroelectric films will then be measured using an automatic probe station. The throughput of materials evaluation using this synthetic technique combined with a rapid, automated measurement of critical properties increases dramatically compared to conventional single sample studies. The current materials I am working on are BaTiO3, SrTiO3 and Sn.